The International Conference “Micro- and Nanoelectronics – 2012” (ICMNE-2012) including the extended Session “Quantum Informatics” (QI-2012) and the Seminar "Silicon-on-Insulator" (SOI-2012)  will be held in October 1-5, 2012 at the holiday hotel “Lipki”, Zvenigorod, Moscow region, Russia. It continues the series of All-Russian Conferences "MNE-1999", "MNE-2001", "QI-2002" and International Conferences "ICMNE-2003", "QI-2004", "ICMNE-2005", "QI-2005", "ICMNE-2007", "QI-2007", "ICMNE-2009", and "QI-2009".

   ICMNE is a biannual event covering the main area of micro- and nanoelectronic technologies and device physics; ICMNE-2012 will be focused on recent progress in that area. The conference will include the exhibition on equipment for micro- and nanoelectronics.

Scope:

Micro-, nanoelectronic materials and films:

• SOI, Si, SiGe, A³B⁵, A²B⁶
• Thin films, high-k dielectrics, low-k dielectrics
• Metal gates, systems for contacts and metallization in nanoscale devices
• Magnetic materials, nanomagnetics
• Nanotubes, graphen
• Materials for optoelectronics and photovoltaic, metamaterials

Micro- and nanoelectronic technologies and equipment:

• Sub-100 nm lithographies: DUV, EUV, electron and ion lithography, nanoimprint
• Plasma and ion-beam processing for micro- and nanoelectronics
• Beam line and plasma immersion ion implantation
• CVD, MBE

Metrology:

• Processes monitoring, end-point detection
• Metrology and characterization of micro- and nanostructures

Physics and technologies of micro- and nanodevices:

• Nanotransistors: MOSFET, SET, and others
• Integrated memory devices, memristors
• Magnetic micro- and nanostructures
• Spintronics devices
• Superconducting micro- and nanodevices and structures
• Devices of optoelectronics, photonics

Simulation and modeling:

• Simulation of technological processes
• Simulation and modeling of micro- and nanoelectronic devices

Quantum informatics:

• Quantum computers: theory and experiments
• Quantum measurements
• Quantum algorithms
• Quantum communications

Organizers and Sponsors:

• Russian Academy of Sciences (RAS), Division of Nano- and Information Technologies, Russia
• Russian Foundation for Basic Research, Russia
• Scientific Council of the RAS "Fundamental Problems of the Device Development for Informational, Computational and Controlling Systems", Russia
• Scientific Council of the RAS on Physical and Chemical Fundamental of Semiconductor Material Science, Russia
• Institute of Physics & Technology of the RAS (FTIAN), Moscow, Russia
• Educational-scientific centre "MSU-FTIAN", Moscow, Russia
• SPIE – The International Society for Optical Engineering
• Institute of Semiconductor Physics (ISP), Siberian Branch of the RAS, Novosibirsk, Russia
• Lomonosov's Moscow State University (MSU), Moscow, Russia
• Yaroslavl Demidov State University, Yaroslavl, Russia
• Moscow Institute of Electronic Engineering (TU) (MIEE), Zelenograd, Russia
• JSC Mikron, Zelenograd, Russia
• Carl Zeiss AG, Germany
• TechoInfo, Ltd., Wembley, UK
• NT-MDT Company, Moscow, Russia
• NIX Company, Moscow, Russia

Language:

   The official language is English

Abstracts Submission:

   You can download a single page abstract template and requirements for full manuscript publication in the Downloads section of the Conference website. Please, submit the files with abstracts to the ICMNE-2012 Local Organizing Committee by address icmne2012@ftian.ru.

Deadline for abstracts submission is June 30, 2012

Proceedings:

   SPIE (http://www.spie.org) will publish the full text of papers in a separate volume of Proceedings of SPIE dedicated to the ICMNE-2012 after Conference termination.

   The authors should prepare manuscripts of papers according the rules of SPIE Proceedings (see Download section) and submit it by service MySPIE. Further information on full-texts publication will be given later.

   Text of full manuscripts should be sent to SPIE by November 5, 2012. Please, post the attached manuscript specifications and SPIE transfer of copyright form to the ICMNE-2012 Local Committee.

   Papers not presented at the ICMNE will not be published in the Proceedings.

   The Conference program will be comprised of invited and contributed papers. Contributed papers will be reviewed by the members of the Program Committee on the basis of submitted abstracts for their being in theme with the Conference, and for their scientific quality. The Program Committee will determine the session (oral or poster) on which the paper will be presented. Author’s preferences are taken into consideration.